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Description

This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research and entrepreneurial activities in pMEMS. The authors discuss the most exciting developments in the area of materials and devices for the making of piezoelectric MEMS resonators, and offer direct examples of the technical challenges that need to be overcome in order to commercialize these types of devices. Some of the topics covered include:
Widely-used piezoelectric materials, as well as materials in which there is emerging interestPrinciple of operation and design approaches for the making of flexural, contour-mode, thickness-mode, and shear-mode piezoelectric resonators, and examples of practical implementation of these devicesLarge scale manufacturing approaches, with a focus on the practical aspects associated with testing and qualificationExamples of commercialization paths for piezoelectric MEMS resonators in the timing and the filter markets...and more!
The authors present industry and academic perspectives, making this book ideal for engineers, graduate students, and researchers.

Pages
424 pages
Collection
Microsystems and Nanosystems
Parution
2017-01-09
Marque
Springer
EAN papier
9783319286860
EAN PDF
9783319286884

Informations sur l'ebook
Nombre pages copiables
4
Nombre pages imprimables
42
Taille du fichier
14326 Ko
Prix
126,59 €
EAN EPUB
9783319286884

Informations sur l'ebook
Nombre pages copiables
4
Nombre pages imprimables
42
Taille du fichier
8868 Ko
Prix
126,59 €