Fundamental Principles of Engineering Nanometrology



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Éditeur :

William Andrew


Paru le : 2009-09-03



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Description
Fundamental Principles of Engineering Nanometrology provides a comprehensive overview of engineering metrology and how it relates to micro and nanotechnology (MNT) research and manufacturing. By combining established knowledge with the latest advances from the field, it presents a comprehensive single volume that can be used for professional reference and academic study. - Provides a basic introduction to measurement and instruments - Thoroughly presents numerous measurement techniques, from static length and displacement to surface topography, mass and force - Covers multiple optical surface measuring instruments and related topics (interferometry, triangulation, confocal, variable focus, and scattering instruments) - Explains, in depth, the calibration of surface topography measuring instruments (traceability; calibration of profile and areal surface texture measuring instruments; uncertainties) - Discusses the material in a way that is comprehensible to even those with only a limited mathematical knowledge
Pages
352 pages
Collection
n.c
Parution
2009-09-03
Marque
William Andrew
EAN papier
9780080964546
EAN EPUB SANS DRM
9781437778328

Prix
130,82 €

Richard Leach is a Principal Research Scientist in the Mass & Dimensional Group, Industry & Innovati

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