Téléchargez le livre : Fabrication and Design of Resonant Microdevices

Fabrication and Design of Resonant Microdevices



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Éditeur :

William Andrew


Paru le : 2008-10-20



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Description
This book discusses the main issues of fabrication and design, and applications of micromachined resonant devices, including techniques commonly used for processing the output signal of resonant micro-electro-mechanical systems (MEMS). Concepts of resonance are introduced, with an overview of fabrication techniques for micromachined devices – important to understand as design options will depend on how the device will be fabricated. Also explained: excitation and signal detection methods; an analytic model of device behavior (a valuable design tool); numerical simulation techniques; issues of damping and noise for resonant MEMS; electronic interfacing; packaging issues; and numerous examples of resonant MEMS from academia and industry. - Offers numerous academic and industrial examples of resonant MEMS - Provides an analytic model of device behaviour - Explains two-port systems in detail - Devotes ample space to excitation and signal detection methods - Covers issues of damping and noise for resonant MEMS, two topics of particular importance for high-Q devices
Pages
250 pages
Collection
n.c
Parution
2008-10-20
Marque
William Andrew
EAN papier
9780815515777
EAN EPUB SANS DRM
9780815519713
Informations sur l'ebook
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Prix
150,86 €

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