Téléchargez le livre : Ion Implantation Technology - 94
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Description
The aim of these proceedings is to present and stimulate discussion on the many subjects related to ion implantation among a broad mix of specialists from areas as diverse as materials science, device production and advanced ion implanters.The contents open with a paper on the future developments of the microelectronics industry in Europe within the framework of the global competition. The subsequent invited and oral presentations cover in detail the following areas: trends in processing and devices, ion-solid interaction, materials science issues, advanced implanter systms, process control and yield, future trends and applications.
Pages
1030 pages
Collection
n.c
Parution
1995-05-16
Marque
North Holland
EAN papier
9780444821942
EAN PDF SANS DRM
9780444599728
Informations sur l'ebook
Ce livre est accessible aux handicaps Voir les informations sur l'accessibilité
Prix
253,20 €

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