Téléchargez le livre : Fundamental Principles of Optical Lithography

Fundamental Principles of Optical Lithography

The Science of Microfabrication

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Éditeur :

Wiley


Paru le : 2011-08-10



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Description
The fabrication of an integrated circuit requires a variety of physical and chemical processes to be performed on a semiconductor substrate. In general, these processes fall into three categories: film deposition, patterning, and semiconductor doping. Films of both conductors and insulators are used to connect and isolate transistors and their components.
By creating structures of these various components millions of transistors can be built and wired together to form the complex circuitry of modern microelectronic devices. Fundamental to all of these processes is lithography, ie, the formation of three-dimensional relief images on the substrate for subsequent transfer of the pattern to the substrate.
This book presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. It comprises ten detailed chapters plus three appendices with problems provided at the end of each chapter.
Additional Information:
Visiting http://www.lithoguru.com/textbook/index.html enhances the reader's understanding as the website supplies information on how you can download a free laboratory manual, Optical Lithography Modelling with MATLAB®, to accompany the textbook. You can also contact the author and find help for instructors.
Pages
544 pages
Collection
n.c
Parution
2011-08-10
Marque
Wiley
EAN papier
9780470018934
EAN PDF
9780470723869
Informations sur l'ebook
Nombre pages copiables
0
Nombre pages imprimables
544
Taille du fichier
5130 Ko
Ce livre est accessible aux handicaps Voir les informations sur l'accessibilité
Prix
73,80 €
EAN EPUB
9781119965077
Informations sur l'ebook
Nombre pages copiables
0
Nombre pages imprimables
544
Taille du fichier
14612 Ko
Ce livre est accessible aux handicaps Voir les informations sur l'accessibilité
Prix
209,89 €

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