Téléchargez le livre : Micro Electro Mechanical System (MEMS) Technology for Multifaceted Applications

Micro Electro Mechanical System (MEMS) Technology for Multifaceted Applications

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Éditeur :

Springer


Paru le : 2025-07-21

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Description

This book details simple methodology for the realization of the practical micro devices employed in general applications. The book brings out practical concept along with process details associated with the device realization. The micro device fabrication technique is similar to MEMS and the application and methodologies are compatible to standard CMOS technologies. This book covers basic of wafer, general micro devices such as micro-heater, temperature sensor, humidity sensor, gas sensor, pyro-device along with associated characterization, integration and assembly aspects. This book provides basic overview and discusses practical aspects with characterization data. This book is targeted for the beginners and researchers providing insight into the practical aspects of this technology.
Pages
160 pages
Collection
n.c
Parution
2025-07-21
Marque
Springer
EAN papier
9789819661619
EAN PDF
9789819661626
Informations sur l'ebook
Nombre pages copiables
1
Nombre pages imprimables
16
Taille du fichier
9062 Ko
Prix
158,24 €
EAN EPUB
9789819661626
Informations sur l'ebook
Nombre pages copiables
1
Nombre pages imprimables
16
Taille du fichier
26982 Ko
Prix
158,24 €

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